Ion Beam Etching of sub-30 nm Scale Magnetic Tunnel Junctions for Spin Transfer Torque Magnetic Random Access Memory Application

제목
Ion Beam Etching of sub-30 nm Scale Magnetic Tunnel Junctions for Spin Transfer Torque Magnetic Random Access Memory Application
저자
이승백
발행일
2011-08-24
학회명
Nano Korea Symposium 2011
개최지
일산 Kintex