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Structural rearrangement of molecular layer deposited metalcone to 2D-like Carbon by electron beam irradiation for area selective deposition
- 제목
- Structural rearrangement of molecular layer deposited metalcone to 2D-like Carbon by electron beam irradiation for area selective deposition
- 저자
- 박진성
- 발행일
- 2022-01-24
- 학회명
- 제 29회 한국반도체학술대회