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Dependency of tunneling magnetoresistance ratio on Pt seed-layer thickness for double MgO perpendicular magnetic tunneling junction spin-valves with a top Co2Fe6B2 free layer ex-situ annealed at 400 degrees C
- Takemura, Yasutaka;
- Lee, Du-Yeong;
- Lee, Seung-Eun;
- Park, Jea-Gun
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7초록
For the double MgO based perpendicular magnetic tunneling junction (p-MTJ) spin-valves with a top Co2Fe6B2 free layer ex situ annealed at 400 degrees C, the tunneling-magnetoresistance ratio (TMR) strongly depended on the platinum (Pt) seed layer thickness (t(Pt)): it peaked (similar to 134%) at a specific t(Pt) (3.3 nm). The TMR ratio was initially and slightly increased from 113%-134% by the enhancement of the magnetic moment of the Co2Fe6B2 pinned layer when tPt increased from 2.0-3.3 nm, and then rapidly decreased from 134%-38.6% by the degrading face-centered-cubic crystallinity of the MgO tunneling barrier when tPt increased from 3.3-14.3 nm.
키워드
Pt seed; p-MTJ; TMR ratio; BEOL; Iron compounds; Magnesia; Magnetic moments; Platinum; Tunnelling magnetoresistance
- 제목
- Dependency of tunneling magnetoresistance ratio on Pt seed-layer thickness for double MgO perpendicular magnetic tunneling junction spin-valves with a top Co2Fe6B2 free layer ex-situ annealed at 400 degrees C
- 저자
- Takemura, Yasutaka; Lee, Du-Yeong; Lee, Seung-Eun; Park, Jea-Gun
- 발행일
- 2016-12
- 유형
- Article
- 저널명
- Nanotechnology
- 권
- 27
- 호
- 48
- 페이지
- 1 ~ 6