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Adsorption behavior of polymer layer onto ceria and its effect on dishing in STI CMP
- 제목
- Adsorption behavior of polymer layer onto ceria and its effect on dishing in STI CMP
- 저자
- 백운규
- 발행일
- 2014-11-19
- 학회명
- International Conference on Planarization/CMP Technology 2014
- 개최지
- Kobe, Japan