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The effect of physicochemical characteristics of ceria particles on PETOS removal rate of chemical planarization for Shallow Trench Isolation
- 제목
- The effect of physicochemical characteristics of ceria particles on PETOS removal rate of chemical planarization for Shallow Trench Isolation
- 저자
- 백운규
- 발행일
- 2002-08-30
- 학회명
- The 2nd Asian conference on crystal growth and crystal technology
- 개최지
- 한양대학교