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Polystyrene/Ceria Core/Shell Abrasive Based Slurry for Highly Enhanced Oxide-film Polishing Rate and Scratch-less in Chemical Mechanical Planarization

  • 박재근
제목
Polystyrene/Ceria Core/Shell Abrasive Based Slurry for Highly Enhanced Oxide-film Polishing Rate and Scratch-less in Chemical Mechanical Planarization
저자
박재근
발행일
2018-10-03
학회명
2018 AiMES
개최지
Moon Palace Resort, Cancun

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