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Growth Behaviors and Structural Characterization of PEALD In2O3 thin films usinig Amide-based and Alkyl-Based Novel Indium Precursors
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- Growth Behaviors and Structural Characterization of PEALD In2O3 thin films usinig Amide-based and Alkyl-Based Novel Indium Precursors
- 저자
- 박진성
- 발행일
- 2023-07-24
- 학회명
- ALD 2023
- 개최지
- BELLEVUE, WASHINGTON, USA