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Effect of Hydrogen Ion Implantation on Self-separation of Free-Standing GaN Wafers Grown by HVPE

  • 박재근
제목
Effect of Hydrogen Ion Implantation on Self-separation of Free-Standing GaN Wafers Grown by HVPE
저자
박재근
발행일
2018-04-26
학회명
8th International Symposium for Advanced Functional Materials & Devices
개최지
World trade center, Grenoble

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