High-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition

제목
High-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition
저자
정재경
발행일
2023-11-29
학회명
MRS 2023
개최지
Boston, Massachusetts