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High-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition
- 제목
- High-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition
- 저자
- 정재경
- 발행일
- 2023-11-29
- 학회명
- MRS 2023
- 개최지
- Boston, Massachusetts