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Effect fo organic modification of nano sized silica particles on the surface roughness of copper film in Cu CMP
- 제목
- Effect fo organic modification of nano sized silica particles on the surface roughness of copper film in Cu CMP
- 저자
- 백운규
- 발행일
- 2005-03-30
- 학회명
- 2005 MRS SPRING MEETING
- 개최지
- San Francisco