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Air Stable Alucone Thin Film Deposited by Molecular Layer Deposition using Hetero Bifunctional Organic Reactant
- 제목
- Air Stable Alucone Thin Film Deposited by Molecular Layer Deposition using Hetero Bifunctional Organic Reactant
- 저자
- 박진성
- 발행일
- 2019-07-24
- 학회명
- 19th International Conference on Atomic Layer Deposition
- 개최지
- Bellevue, Washington, USA