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TiAlN Diffusion Barrier Deposited by Atomic Layer Deposition Method

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TiAlN Diffusion Barrier Deposited by Atomic Layer Deposition Method
저자
전형탁
발행일
2001-02-14
학회명
제 8 회 한국반도체 학술대회
개최지
COEX 컨벤션센타

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