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Process temperature dependence on Moisture permeation barrier characteristics of Al2O3 Films deposited by Remote Plasma Atomic layer deposition

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Process temperature dependence on Moisture permeation barrier characteristics of Al2O3 Films deposited by Remote Plasma Atomic layer deposition
저자
전형탁
발행일
2012-11-27
학회명
2012 MRS fall meeting
개최지
미국

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