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The effects of rotary reactor with wave bumps in atomic layer deposition: its application to the fabrication of core/shell nano-particles
- 제목
- The effects of rotary reactor with wave bumps in atomic layer deposition: its application to the fabrication of core/shell nano-particles
- 저자
- 안진호
- 발행일
- 2016-02-23
- 학회명
- 제23회 한국반도체학술대회
- 개최지
- 강원도 하이원리조트