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Design of Extreme Proximity Gettering for Advanced Semiconductor Devices Beyond 3X nm Technology

  • 박재근
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Design of Extreme Proximity Gettering for Advanced Semiconductor Devices Beyond 3X nm Technology
저자
박재근
발행일
2010-10-14
학회명
2010 SiWEDS Fall Meeting
개최지
USA/ Las Vegas Riviera Hotel

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