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Galvanic corrosion inhibition from the aspect of bonding orbital theory in Cu/Ru barrier metal chemical mechanical planarization(CMP)
- 제목
- Galvanic corrosion inhibition from the aspect of bonding orbital theory in Cu/Ru barrier metal chemical mechanical planarization(CMP)
- 저자
- 백운규
- 발행일
- 2022-11-17
- 학회명
- ICCCI2022
- 개최지
- 일본 후지요시다 하이랜드리조트