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Characteristics of Hf-silicate Thin Film Grownby Remote Plasma Atomic Layer Deposition with Various Silicon Composition

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Characteristics of Hf-silicate Thin Film Grownby Remote Plasma Atomic Layer Deposition with Various Silicon Composition
저자
전형탁
발행일
2006-07-25
학회명
AVS International Conference on Atomic Layer Deposition
개최지
서울교육문화회관

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