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Effect of physico-chemical properties of cellulosic polymers on wafer polishing process
- 제목
- Effect of physico-chemical properties of cellulosic polymers on wafer polishing process
- 저자
- 백운규
- 발행일
- 2005-06-15
- 학회명
- International Conference on Electroceramics 2005
- 개최지
- kist