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Study on Low-k Polyimide Etching with SF6/O2 plasma

제목
Study on Low-k Polyimide Etching with SF6/O2 plasma
저자
안진호
발행일
2001-02-14
학회명
제 8회 한국 반도체학술대회
개최지
COEX 컨벤션센터

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