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Effect of Molecular Weight of Surfactant in Nano Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing

  • 박재근
제목
Effect of Molecular Weight of Surfactant in Nano Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing
저자
박재근
발행일
2004-05-14
학회명
2004 Spring, Materials Research Society of Korea
개최지
Kang-Reung University, Kang-Reung, Korea

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