Particulate Matter Sensor Based on Two-Stage Cascade Virtual Impactors and Thermophoretic Microheaters

Choi, Kwang-Wook; Kim, Ilhwan; Chung, Seokwhan; Sung, Gi-Bong; Yook, Se Jin

doi:10.1109/MEMS49605.2023.10052538

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Particulate Matter Sensor Based on Two-Stage Cascade Virtual Impactors and Thermophoretic Microheaters

Choi, Kwang-Wook;
Kim, Ilhwan;
Chung, Seokwhan;
Sung, Gi-Bong;
Yook, Se Jin

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초록

A particulate matter (PM) sensor that simultaneously measures the concentrations of PM2.5 and PM1.0 is reported in this study. Two serially connected virtual impactors (VIs) separate aerosol particles according to their sizes, which are subsequently collected on the surface of the gravimetric sensor through thermophoresis. The fabricated device achieved a mass sensitivity of 11 Hz/min per μgm-3 and 10 Hz/min per μgm-3 for PM2.5 and PM1.0, respectively, which is the highest among the gravimetric PM sensors reported to date. This result is attributed to the precise fluid-dynamic design of the VIs and the development of efficient microheaters that can provide localized heat and corresponding forces to the aerosol particles.

키워드

Airborne particle; Gravimetric sensor; Particulate matter sensor; Thermophoresis; Virtual impactor; Aerosols; Microelectromechanical devices; Particles (particulate matter); Thermophoresis; MEMS; Aerosol particles; Airborne particle; Fabricated device; Gravimetric sensors; Mass sensitivity; Microheater; Particulate Matter; Particulate matter sensor; Thermophoretic; Virtual impactors

제목: Particulate Matter Sensor Based on Two-Stage Cascade Virtual Impactors and Thermophoretic Microheaters

저자: Choi, Kwang-Wook; Kim, Ilhwan; Chung, Seokwhan; Sung, Gi-Bong; Yook, Se Jin

DOI: 10.1109/MEMS49605.2023.10052538

발행일: 2023-01

유형: Proceedings Paper

저널명: 2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS

권: 2023-January

페이지: 993 ~ 996