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Influence of Hydrogen Post-implantation on Threading Dislocation Density in Strain-relaxed SiGe Layer

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Influence of Hydrogen Post-implantation on Threading Dislocation Density in Strain-relaxed SiGe Layer
저자
박재근
발행일
2015-10-14
학회명
228th ECS Meeting
개최지
Hyatt Regency Phoenix & Phoenix Convention Center

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