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Wafer bow property of free-standing GaN substrates grown by hydride vapor phase epitaxy

  • 박재근
제목
Wafer bow property of free-standing GaN substrates grown by hydride vapor phase epitaxy
저자
박재근
발행일
2016-11-02
학회명
5th International Symposium for Advanced Functional Materials & Devices
개최지
SUMCO Kyushu Factory (Imari)

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