Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator

Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito

doi:10.1109/TRANSDUCERS.2019.8808489

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Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator

Shim, Hang;
Sakamoto, Kei;
Inomata, Naoki;
Toda, Masaya;
Toan,Nguyen Van;
... Song, Yun Heub;
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초록

This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fe-y for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe.

키워드

Electrodeposition; TbxDy(1-x)Fey; Terfenol-D; Actuators; Electrodeposition; Electrodes; Magnetic actuators; Magnetism; Magnetostrictive devices; Microsystems; Bi-material cantilever; Magnetic actuation; Magnetostriction coefficient; Magnetostrictive thin films; Process Technologies; TbxDy(1-x)Fey; Terfenol-D; Three electrode; Solid-state sensors

제목: Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator

저자: Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito

DOI: 10.1109/TRANSDUCERS.2019.8808489

발행일: 2019-06

유형: Conference Paper

저널명: International Solid-State Sensors, Actuators and Microsystems Conference

페이지: 1698 ~ 1700