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Organic-inorganic hybrid gate dielectrics with improved dielectric properties via uv treatment for flexible electronics
- Hur, Jaeseok;
- Kim, Jeongoh;
- Kim, Hyeona;
- Jeong, Jae Kyeong
Citations
SCOPUS
0초록
Metal-insulator-metal (MIM) capacitors with poly(4-vinylphenol-co-methylmethacrylate) (PVP-co-PMMA) based organic-inorganic hybrid gate dielectrics were fabricated at a low temperature (150 'C) after DUV treatment. The resulting hybrid dielectric f?lms showed a low leakage current density, a high breakdown E-field strength, and a high dielectric constant via DUV treatment.
키워드
Dielectric; DUV; Hybrid; Low temperature; Polymer; Dielectric materials; Dielectric properties; Flexible electronics; Gate dielectrics; Leakage currents; Metal insulator boundaries; MIM devices; Polymers; Temperature; High breakdown; High dielectric constants; Hybrid; Hybrid dielectrics; Low temperatures; Low-leakage current; Metal insulator metal capacitor (MIM); Organic-inorganic hybrid; organic-inorganic materials
- 제목
- Organic-inorganic hybrid gate dielectrics with improved dielectric properties via uv treatment for flexible electronics
- 저자
- Hur, Jaeseok; Kim, Jeongoh; Kim, Hyeona; Jeong, Jae Kyeong
- 발행일
- 2018-12
- 유형
- Conference Paper
- 저널명
- Proceedings of the International Display Workshops
- 권
- 3
- 페이지
- 1542 ~ 1544
- 언어
- ENG
- 분량
- 3 페이지
- ISSN
- P 1883-2490