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Deposition of low stress,high transmittance SiC as an x-ray mask membrane usingECR plasma CVD

제목
Deposition of low stress,high transmittance SiC as an x-ray mask membrane usingECR plasma CVD
저자
안진호
발행일
1998-02-01
학회명
제 5회 한국 반도체 학술대회

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