Effects of vertical thickness scaling on the interlayer disturbance in 3D SONOS NAND Flash memory

제목
Effects of vertical thickness scaling on the interlayer disturbance in 3D SONOS NAND Flash memory
저자
이승백
발행일
2014-07-02
학회명
The 12th international nanotech conference and nano-convergence expo
개최지
Seoul, Korea