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Controlled Oxide State Design for High-Performance Cobalt Chemical Mechanical Planarization
- 제목
- Controlled Oxide State Design for High-Performance Cobalt Chemical Mechanical Planarization
- 저자
- 백운규
- 발행일
- 2026-04-29
- 학회명
- 2026 MRS Spring Meeting & Exhibit
- 개최지
- Sheraton Waikiki Beach Resort, Hawaii, USA