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Influence of Hydrocarbon Chain Length in Phenyl(Alkyl)trimethoxysilane Inhibitors on AS-ALD Selectivity: Comparison of Gas-phase and Liquid-phase Adsorption
- 제목
- Influence of Hydrocarbon Chain Length in Phenyl(Alkyl)trimethoxysilane Inhibitors on AS-ALD Selectivity: Comparison of Gas-phase and Liquid-phase Adsorption
- 저자
- 박진성
- 발행일
- 2025-06-23
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU