ScholarWorks@한양대학교

상세 보기

Application of oxidation resistive Ru capping layer for EUVL mask

제목
Application of oxidation resistive Ru capping layer for EUVL mask
저자
안진호
발행일
2006-05-10
학회명
IUMRS - ICA - 2006
개최지
Jeju, Korea

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.