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Multi-selective Chemical-mechanical-polishing Slurry for NAND Flash Memories beyond 32nm

  • 박재근
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Multi-selective Chemical-mechanical-polishing Slurry for NAND Flash Memories beyond 32nm
저자
박재근
발행일
2009-04-15
학회명
2009 MRS Spring Meeting
개최지
San Fransisco, CA

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