ScholarWorks@한양대학교

상세 보기

The p-n heterojunction properties on CoOx/IGZO film with various oxygen flow ratio by RF magnetron sputtering

  • 김은규
제목
The p-n heterojunction properties on CoOx/IGZO film with various oxygen flow ratio by RF magnetron sputtering
저자
김은규
발행일
2021-08-19
학회명
제 61회 한국진공학회 하계정기학술대회
개최지
소노캄 제주

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.