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Oxygen precipitation behavior on the crystal nature of CZ grown Si crystal

  • 박재근
제목
Oxygen precipitation behavior on the crystal nature of CZ grown Si crystal
저자
박재근
발행일
2002-08-21
학회명
The 11th Seoul International Symposium on the Physics of Semiconductors and applications-2002
개최지
Cheju Grand Hotel(Korea)

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