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Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for STI-CMP

  • 박재근
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Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for STI-CMP
저자
박재근
발행일
2006-05-19
학회명
2006년도 학국재료학회(춘계학술발표대회)
개최지
경상대학교

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