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Effect of the gradient of the fin side wall on the electrical characteristics of FinFETs

  • 김태환
제목
Effect of the gradient of the fin side wall on the electrical characteristics of FinFETs
저자
김태환
발행일
2013-07-10
학회명
The 11th International Nanotech Symposium & Nano-Convergence Expo
개최지
Coex, Seoul, Korea

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