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Enhancing Selectivity for AS-ALD of MoO2 through Hydrogen Treatment: Strategy of Surface Cleaning and Expanding Deactivated Areas
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- Enhancing Selectivity for AS-ALD of MoO2 through Hydrogen Treatment: Strategy of Surface Cleaning and Expanding Deactivated Areas
- 저자
- 박진성
- 발행일
- 2024-08-06
- 학회명
- ALD/ALE 2024
- 개최지
- Messukeskus in Helsinki, Finland