상세 보기
- 제목
- Polymer Link Breakage of Polyimide‑film‑surface using Hydrolysis Reaction Accelerator for Enhancing Chemical–mechanical‑planarization Polishing‑rate
- 저자
- 박재근
- 발행일
- 2022-11-14
- 학회명
- Korean international semiconductor conference on manufactureing technology 2022
- 개최지
- 부산