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- 제목
- The Role of Molecular Weight of Poly(Acrylic Acid) on the Oxide-to-Nitride Selectivity in STI CMP
- 저자
- 박재근
- 발행일
- 2004-11-03
- 학회명
- EnCera 04, The 3rd International Symposium on the Science of Engineering Ceramics
- 개최지
- Senri-Hankyu Hotel, Osaka, Japan