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Microstructures of HfO2 Thin Films on Si and Ge Evaluated Using Small Angle Neutron Scattering

제목
Microstructures of HfO2 Thin Films on Si and Ge Evaluated Using Small Angle Neutron Scattering
저자
안진호
발행일
2012-08-26
학회명
IUMRS-ICA 2012
개최지
Korea

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