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Thermal-stable low-k SiONC thin films deposited by plasma-assisted molecular layer deposition with Tetraisocyanatesilane (TICS) and Phloroglucinol (Phl)
- 제목
- Thermal-stable low-k SiONC thin films deposited by plasma-assisted molecular layer deposition with Tetraisocyanatesilane (TICS) and Phloroglucinol (Phl)
- 저자
- 박진성
- 발행일
- 2024-06-05
- 학회명
- ISPSA 2024
- 개최지
- Ramada Plaza Jeju Hotel, Jeju, Korea