Electrical Characteristics and Reliability Evaluation of IGZO TFTs under Hydrogen Plasma Treatement and Thermal Stress

제목
Electrical Characteristics and Reliability Evaluation of IGZO TFTs under Hydrogen Plasma Treatement and Thermal Stress
저자
이승백
발행일
2025-11-10
학회명
The 4th Korea International Semiconductor Converence & Exhibition on Manufacturing Technology
개최지
Paradise Hotel Busan, Busan