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Characterization of Al-doped ZnO thin film grown on buffer layer with RF magnetron sputtering method

  • 김태환
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Characterization of Al-doped ZnO thin film grown on buffer layer with RF magnetron sputtering method
저자
김태환
발행일
2009-02-11
학회명
2009년 한국 진공학회 동계 정기학술대회
개최지
현대성우리조트, 횡성, Korea

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