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Study on the defect states of Fe-implanted Si by using deep level transient spectroscopy

  • 김은규
제목
Study on the defect states of Fe-implanted Si by using deep level transient spectroscopy
저자
김은규
발행일
2011-10-11
학회명
2011년 한국물리학회 가을학술논문발표회
개최지
부산 BEXCO

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