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Molecular Layer Deposition of Indicone Thin film using Indium Precursor and Hydroquinone
- 제목
- Molecular Layer Deposition of Indicone Thin film using Indium Precursor and Hydroquinone
- 저자
- 박진성
- 발행일
- 2019-12-24
- 학회명
- 19th International Conference on Atomic Layer Deposition
- 개최지
- Bellevue, Washington, USA