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Effects of Nitrogen Profile on Characteristics of Remote Plasma Atomic Layer Deposited-Nitrided Hf Silicate Thin Films

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Effects of Nitrogen Profile on Characteristics of Remote Plasma Atomic Layer Deposited-Nitrided Hf Silicate Thin Films
저자
전형탁
발행일
2008-07-01
학회명
8th International Conference on Atomic Layer Deposition- ALD 2008
개최지
Brugge, Belgium

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