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Forming Gas Annealing Effect on Reducing Oxygen at Ru/W Interface for Memory Capacitor Application
- 제목
- Forming Gas Annealing Effect on Reducing Oxygen at Ru/W Interface for Memory Capacitor Application
- 저자
- 안진호
- 발행일
- 2023-07-06
- 학회명
- NANO KOREA 2023
- 개최지
- 일산 KINTEX