Synthesis and thermal characterization of asymmetric titanium MOCVD precursors for thin films of titanium oxide

  • 구상만
제목
Synthesis and thermal characterization of asymmetric titanium MOCVD precursors for thin films of titanium oxide
저자
구상만
발행일
2004-03-28
학회명
227th ACS National Meeting
개최지
Anaheim, CA, United States