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The synthesis of tungsten disulfide by using sulfur annealing with tungsten carbon nitride thin film deposited by atomic layer deposition

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The synthesis of tungsten disulfide by using sulfur annealing with tungsten carbon nitride thin film deposited by atomic layer deposition
저자
전형탁
발행일
2016-11-28
학회명
2016 MRS Fall Meeting & Exhibit
개최지
Boston, Massachusetts

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