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Comparison of Microchannel Quality between Poly Silicon and Chrome Hard Masks for Fabrication of Glass Microfluidic Chip
- 제목
- Comparison of Microchannel Quality between Poly Silicon and Chrome Hard Masks for Fabrication of Glass Microfluidic Chip
- 저자
- 송시몬
- 발행일
- 2007-10-05
- 학회명
- 한국바이오칩학회 추계학술대회
- 개최지
- 성남, 경기도