Comparison of Microchannel Quality between Poly Silicon and Chrome Hard Masks for Fabrication of Glass Microfluidic Chip

제목
Comparison of Microchannel Quality between Poly Silicon and Chrome Hard Masks for Fabrication of Glass Microfluidic Chip
저자
송시몬
발행일
2007-10-05
학회명
한국바이오칩학회 추계학술대회
개최지
성남, 경기도