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Femtosecond Laser Interference Structuring of Amorphous Silicon by TiO2 Phase Grating Fabricated Using Lift-off Technique
- 제목
- Femtosecond Laser Interference Structuring of Amorphous Silicon by TiO2 Phase Grating Fabricated Using Lift-off Technique
- 저자
- 안진호
- 발행일
- 2006-02-24
- 학회명
- 13회 반도체학술대회
- 개최지
- 제주호텔